MKS Instruments MC20A-30190 Mass Flow Controllers, High-Precision Gas Flow Control

The MKS MC20A-30190 Mass Flow Controllers are designed for high precision mass flow control applications, ensuring consistent delivery of gases in a wide range of industries including semiconductor manufacturing, chemical processing, and pharmaceuticals.

Description

Model Number:MC20A-30190

Flow Range (Standard):10 – 100 slpm

Pressure Range (Standard):Vacuum to 5 bar

Accuracy:+/- 1% of F.S.

Repeatability:+/- 0.1% of F.S.

Temperature Coefficient:< 0.02% / °C

Response Time:≤ 0.5 sec

Power Consumption:≤ 5 W

Operating Temperature:-40°C to +85°C

Humidity:0 to 95% non-condensing

Enclosure Type:IP65 rated

Material:Stainless Steel (SS316L)

Connection:ISO 286-1 B1

    The MKS MC20A-30190 Mass Flow Controllers are designed for precise and reliable mass flow rate control in a wide range of industrial environments. These controllers feature a compact and robust design, utilizing high-quality materials such as stainless steel (SS316L) for durability and longevity.

    With an operating temperature range from -40°C to +85°C and a humidity tolerance of 0 to 95% non-condensing, these controllers are suitable for use in extreme environmental conditions. The IP65 rated enclosure ensures protection against dust and water ingress, making them ideal for outdoor or harsh indoor applications.

    Equipped with advanced electronics, the MC20A-30190 provides exceptional accuracy and repeatability, delivering flow rates within +/- 1% of full scale and repeatability of +/- 0.1% of full scale. This precision is critical for applications requiring consistent performance and minimal error margins.

    These controllers feature a fast response time of ≤ 0.5 seconds, allowing for quick adjustments and responsiveness in dynamic processes. The low power consumption of ≤ 5 W ensures energy efficiency, reducing operational costs without compromising on performance.

    For installation flexibility, the MKS MC20A-30190 supports ISO 286-1 B1 connection standards, compatible with a wide range of industry-standard fittings. The controllers can be easily integrated into existing systems, minimizing downtime and facilitating quick deployment.

MKS MC20A-30190 Mass Flow Controllers

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